AP0849 Spectroscopic Diagnostics of Cu:Al Plasma Produced by DC Magnetron Discharge at Different Working Conditions

Abstract

In this study, a spectroscopic study on Cu:Al co-sputtering was investigated in detail. The study includes the effect of varying vacuum pressures and applied voltages on plasma parameters to optimize these operational parameters that lead to enhanced sputtering efficiency. An important finding is the optimal Ar pressure at 0.3 mbar, and the electrical discharge was enhanced directly with the applied voltage. The highest emission intensity emitted from the sputtered species, electron temperature (T_e), and electron number density (n_e) occurred at the same 0.3 vacuum pressure. They demonstrated a technique of observation of the plasma in the Cu: Al co-spraying system and their effect on the sputtering process.