Enhanced Gas Sensing Performance of Plasma-Treated Tin-Zinc–Oxide Thin Films Deposited by Spray Pyrolysis

Abstract

This study explores the impact of plasma treatment on the gas sensing capabilities of tin-zinc oxide (SZO) composite thin films, fabricated through spray pyrolysis. It investigates variations in Sn atomic ratios, ranging from 0.0 to 0.6. The study explores the effects of plasma etching, utilizing cold plasma induced by a plasma torch, on the morphological and electrical characteristics of the prepared SZO films. Findings, revealed by Field Emission Scanning Electron Microscopy (FE-SEM), illustrates a noteworthy porous structure with uniformly sized spherical nanoparticles. The introduction of plasma induces significant surface porosity, thereby enhancing gas sensing performance through the porous SZO layer. Testing against NO₂ gas indicates an optimum operating temperature of 150°C. These results emphasize the effectiveness of the plasma exposure method in significantly improving the efficiency of NO₂ gas sensing, marking a crucial advancement in sensor technology.